Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates - CY Cergy Paris Université
Journal Articles ACS Applied Materials & Interfaces Year : 2016

Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates

Abstract

Recent progress in the field of microsystems on flexible substrates raises the need for alternatives to the stiffness of classical actuation technologies. This paper reports a top-down process to microfabricate soft conducting polymer actuators on substrates on which they ultimately operate. The bending microactuators were fabricated by sequentially stacking layers using a layer polymerization by layer polymerization of conducting polymer electrodes and a solid polymer electrolyte. Standalone microbeams thinner than 10 μm were fabricated on SU-8 substrates associated with a bottom gold electrical contact. The operation of microactuators was demonstrated in air and at low voltage (±4 V).
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hal-02980109 , version 1 (06-07-2022)

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Ali Maziz, Cedric Plesse, Caroline Soyer, Eric Cattan, Frederic Vidal. Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates. ACS Applied Materials & Interfaces, 2016, 3, pp.1559-1564. ⟨10.1021/acsami.5b09577⟩. ⟨hal-02980109⟩
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